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A Novel Photoresist based on Polymeric Acid Amplifier
Eun Ju Lee Yong Seok Jeong Kwon Taek Lim Yeon Tae Jeong
Vol. 48, No. 1, pp. 39-0, Feb. 2004
10.5012/jkcs.2004.48.1.039
Vol. 48, No. 1, pp. 39-0, Feb. 2004
10.5012/jkcs.2004.48.1.039
ISSN(Print) 1017-2548
ISSN(Online) 2234-8530
