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The Fundamental Studies of the New Glow Discharge/Inductively Coupled Plasma Interface: Part I.Preliminary Studies
Gae Ho Lee  Hyo Shik Kil  Hyung Seung Kim  Gary M. Hieftje
Vol. 43, No. 2, pp. 182-192, Apr. 1999

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ISSN(Print) 1017-2548
ISSN(Online) 2234-8530